Three-dimensional all-dielectric metamaterial solid immersion lens for subwavelength imaging at visible frequencies

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Science Advances  12 Aug 2016:
Vol. 2, no. 8, e1600901
DOI: 10.1126/sciadv.1600901

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Although all-dielectric metamaterials offer a low-loss alternative to current metal-based metamaterials to manipulate light at the nanoscale and may have important applications, very few have been reported to date owing to the current nanofabrication technologies. We develop a new “nano–solid-fluid assembly” method using 15-nm TiO2 nanoparticles as building blocks to fabricate the first three-dimensional (3D) all-dielectric metamaterial at visible frequencies. Because of its optical transparency, high refractive index, and deep-subwavelength structures, this 3D all-dielectric metamaterial-based solid immersion lens (mSIL) can produce a sharp image with a super-resolution of at least 45 nm under a white-light optical microscope, significantly exceeding the classical diffraction limit and previous near-field imaging techniques. Theoretical analysis reveals that electric field enhancement can be formed between contacting TiO2 nanoparticles, which causes effective confinement and propagation of visible light at the deep-subwavelength scale. This endows the mSIL with unusual abilities to illuminate object surfaces with large-area nanoscale near-field evanescent spots and to collect and convert the evanescent information into propagating waves. Our all-dielectric metamaterial design strategy demonstrates the potential to develop low-loss nanophotonic devices at visible frequencies.

  • All-dielectric metamaterials
  • titanium dioxide
  • self-assembly, solid immersion lens
  • super-resolution imaging

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