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Polymeric lithography editor: Editing lithographic errors with nanoporous polymeric probes

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Science Advances  09 Jun 2017:
Vol. 3, no. 6, e1602071
DOI: 10.1126/sciadv.1602071

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vol. 3 no. 6

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    Author Information

    1. Pradeep Ramiah Rajasekaran1,*,
    2. Chuanhong Zhou1,,
    3. Mallika Dasari1,
    4. Kay-Obbe Voss2,
    5. Christina Trautmann2,3 and
    6. Punit Kohli1,
    1. 1Department of Chemistry and Biochemistry, Southern Illinois University, Carbondale, IL 62901, USA.
    2. 2GSI Helmholtzzentrum, 64291 Darmstadt, Germany.
    3. 3Technische Universität, 64289 Darmstadt, Germany.
    1. Corresponding author. Email: pkohli{at}chem.siu.edu
    • * Present address: Institute for Systems Research, University of Maryland, College Park, MD 20740, USA.

    • Present address: Vuzix Corporation, 2166 Brighton Henrietta Town Line Road, Rochester, NY 14623, USA.

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