Research ArticleNANOSTRUCTURES

Electrochemical electron beam lithography: Write, read, and erase metallic nanocrystals on demand

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Science Advances  12 Jul 2017:
Vol. 3, no. 7, e1700234
DOI: 10.1126/sciadv.1700234

Article Information

vol. 3 no. 7

Online ISSN: 
History: 
  • Received for publication January 22, 2017
  • Accepted for publication June 12, 2017

Author Information

  1. Jeung Hun Park1,2,3,
  2. Daniel A. Steingart2,*,
  3. Suneel Kodambaka1,* and
  4. Frances M. Ross3,*
  1. 1Department of Materials Science and Engineering, University of California, Los Angeles, 410 Westwood Plaza, Los Angeles, CA 90095, USA.
  2. 2Department of Mechanical and Aerospace Engineering, and Andlinger Center for Energy and the Environment, Princeton University, Princeton, NJ 08544, USA.
  3. 3IBM Thomas J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA.
  1. *Corresponding author. Email: steingart{at}princeton.edu (D.A.S.); kodambaka{at}ucla.edu (S.K.); fmross{at}us.ibm.com (F.M.R.)

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Aug 2017311170231
Sep 2017191149148
Oct 201713812591
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Dec 2017727545