Research ArticleENGINEERING
Nanotwinned metal MEMS films with unprecedented strength and stability
- Gi-Dong Sim1,
- View ORCID ProfileJessica A. Krogstad2,
- K. Madhav Reddy1,
- Kelvin Y. Xie1,
- Gianna M. Valentino1,
- Timothy P. Weihs3 and
- Kevin J. Hemker1,3,*
- 1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
- 2Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
- 3Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
- ↵*Corresponding author. Email: hemker{at}jhu.edu
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Science Advances 28 Jun 2017:
Vol. 3, no. 6, e1700685
DOI: 10.1126/sciadv.1700685
Vol. 3, no. 6, e1700685
DOI: 10.1126/sciadv.1700685
Gi-Dong Sim
1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Jessica A. Krogstad
2Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
K. Madhav Reddy
1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Kelvin Y. Xie
1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Gianna M. Valentino
1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Timothy P. Weihs
3Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
Kevin J. Hemker
1Department of Mechanical Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.
3Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, MD 21218, USA.