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Silicon nanomembrane phototransistor flipped with multifunctional sensors toward smart digital dust

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Science Advances  01 May 2020:
Vol. 6, no. 18, eaaz6511
DOI: 10.1126/sciadv.aaz6511

Article Information

vol. 6 no. 18

Online ISSN: 
History: 
  • Received for publication September 27, 2019
  • Accepted for publication February 12, 2020
  • .

Author Information

  1. Gongjin Li1,*,
  2. Zhe Ma2,*,
  3. Chunyu You1,*,
  4. Gaoshan Huang1,
  5. Enming Song1,3,
  6. Ruobing Pan1,
  7. Hong Zhu1,
  8. Jiaqi Xin1,
  9. Borui Xu1,
  10. Taeyoon Lee4,
  11. Zhenghua An5,
  12. Zengfeng Di2 and
  13. Yongfeng Mei1,4,
  1. 1Department of Materials Science, State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, P. R. China.
  2. 2Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, P. R. China.
  3. 3Center for Bio-Integrated Electronics, Northwestern University, Evanston, IL 60208, USA.
  4. 4Department of Electrical and Electronic Engineering, Yonsei University, Seoul 03722, South Korea.
  5. 5Department of Physics, Fudan University, Shanghai 200433, P. R. China.
  1. Corresponding author. Email: yfm{at}fudan.edu.cn
  • * These authors contributed equally to this work.

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