Science Advances

Supplementary Materials

This PDF file includes:

  • Deviation between experiment and simulation
  • Effect of higher-order diffraction mode
  • Dependence of resonant wavelength on geometric parameters
  • Fig. S1. Surface profile measured by AFM.
  • Fig. S2. Tilted SEM image of the fabricated bilayer metasurface, showing nonuniform grains of gold at the sidewall of HSQ pillars.
  • Fig. S3. Dependence of the extinction ratio on the thickness of cladding layer and the thickness of deposited gold film.
  • Fig. S4. Refraction efficiency of the cross-polarized component in each diffraction orders.
  • Fig. S5. Electric field distribution on the top layer of the bilayer metasurface at 770 nm.
  • Fig. S6. Transverse currents distribution under symmetric excitation.
  • Fig. S7. Dependence of the conversion efficiency on the width of nanoantennas.
  • Fig. S8. Dependence of the conversion efficiency on the length of nanoantennas.
  • Fig. S9. Schematic representation of the optical measurement setup.
  • Fig. S10. Dependence of the conversion efficiency on the height of the HSQ pillars.

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