Science Advances

Supplementary Materials

This PDF file includes:

  • Detailed description of XANES mapping
  • Standard XANES data treatment
  • Discussion of energy calibration
  • Discussion of x-ray–matter interaction with respect to XBIC yield
  • Discussion of the spatial resolution
  • fig. S1. Ga in Ga2O3 K-edge XANES references.
  • fig. S2. Ga in GaAs K-edge XANES.
  • fig. S3. Linear combination analysis of XRF data.
  • fig. S4. Linear combination analysis of XBIC data.
  • fig. S5. Determination of the spatial resolution of the setup.
  • table S1. XANES energy steps of the x-ray beam for the XANES measurements.
  • table S2. Cross sections and Auger yields for relevant elements and x-ray energies.
  • References (35–42)

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