Science Advances

Supplementary Materials

This PDF file includes:

  • Section S1. The GMMT and specification of FOM
  • Section S2. Derivation of the derivative
  • Section S3. Optimization parameters
  • Section S4. Mie coefficients
  • Section S5. Effect of fabrication defects
  • Section S6. The 3 μm experimental and simulation data
  • Section S7. Computing resources
  • Fig. S1. Optimization scheme.
  • Fig. S2. Mie coefficients.
  • Fig. S3. SEM of the initial device.
  • Fig. S4. Simulated and experimental device performance.
  • Fig. S5. Extracted focal spots and locations.
  • Fig. S6. In-plane focal spot comparison.
  • Fig. S7. The 3 μm simulated and experimental device performance.
  • Fig. S8. The 3 μm device SEM.
  • Table S1. Benefits and drawbacks of the design approach.
  • Table S2. Optimization parameters.
  • References (41, 42)

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