RT Journal Article
SR Electronic
T1 Self-assembly of highly sensitive 3D magnetic field vector angular encoders
JF Science Advances
JO Sci Adv
FD American Association for the Advancement of Science
SP eaay7459
DO 10.1126/sciadv.aay7459
VO 5
IS 12
A1 Becker, Christian
A1 Karnaushenko, Daniil
A1 Kang, Tong
A1 Karnaushenko, Dmitriy D.
A1 Faghih, Maryam
A1 Mirhajivarzaneh, Alaleh
A1 Schmidt, Oliver G.
YR 2019
UL http://advances.sciencemag.org/content/5/12/eaay7459.abstract
AB Novel robotic, bioelectronic, and diagnostic systems require a variety of compact and high-performance sensors. Among them, compact three-dimensional (3D) vector angular encoders are required to determine spatial position and orientation in a 3D environment. However, fabrication of 3D vector sensors is a challenging task associated with time-consuming and expensive, sequential processing needed for the orientation of individual sensor elements in 3D space. In this work, we demonstrate the potential of 3D self-assembly to simultaneously reorient numerous giant magnetoresistive (GMR) spin valve sensors for smart fabrication of 3D magnetic angular encoders. During the self-assembly process, the GMR sensors are brought into their desired orthogonal positions within the three Cartesian planes in a simultaneous process that yields monolithic high-performance devices. We fabricated vector angular encoders with equivalent angular accuracy in all directions of 0.14°, as well as low noise and low power consumption during high-speed operation at frequencies up to 1 kHz.