Summary of the flexible NVM elements. PZTx, PbZrxTi1−xO3; P(VDF-TrFE), poly[(vinylidenefluoride)-co-trifluoroethylene]; BTO, barium titanate; PET, polyethylene terephthalate; PI, polyimide; PEN, polyethylene naphthalate.
| Ferroelectric material | PZT20* | PZT20* | PZT52† | PZT52 | PZT53 | PZT30 | PZT52 | PZT | BTO | P(VDF-TrFE) | |||
| Flexible substrate | Mica | Si | Ni superalloy ribbons | Si | Pt foil | PI | Cu foil | Plastic | PET | Al foil | Organic | PEN | PI |
| Transfer required | No | Yes | No | No | Yes | No | No | Yes | No | Yes | No | No | No |
| Pr (μC/cm2) | 60 | 75 | 40 | 18 | 25.5 | 15 | 20 | ~20 | — | 11 | 7.4 | 8.52 | — |
| Ec (kV/cm) | 100 | 400 | 91 | 60 | 54.9 | ~500 | ~25 | 1.1 V | — | 830 | 500 | 650 | — |
| Capacitance (F/cm2) | 2.85 | ~1.6 | — | 4 | — | — | — | 2.7 | — | — | 0.062 | — | — |
| Dielectric constant | 460 @ 1 MHz | — | — | 541 @ 1 kHz | — | 80 @ 1 kHz | ~1150 | — | 250 @ 0.1 MHz | — | — | — | — |
| Switching time (ns) | 2000 | — | — | 500 | — | 165 | — | — | — | — | — | — | — |
| Fatigue (cycles) | >1010 (unbent) >1010 (bent) | — | — | >109 (unbent) >1010 (bent) | 107 | 15% loss @ 107 | 1010 | — | — | — | — | — | 102 |
| Retention (years) | >10 (unbent) >10 (bent) | — | — | >10 | — | 20% loss @ 105 s | — | — | — | — | — | — | >7000 s |
| Cell size (mm2) | 0.00785– 0.0314 | 0.0484 | 0.00785– 0.0471 | 0.01– 0.0625 | 0.008 | 0.03 | — | 0.01 | 16 | 0.025 | 0.03– 0.25 | — | — |
| Minimum bending radius (mm) | 2.5 | — | — | 5 | — | — | — | 8 | — | 6 | — | 7 | 0.5 |
| Bending cycles @ radius | >1000 @ 5 mm | — | — | 1000 @ 5 mm | — | — | — | — | — | 500 @ 11 mm | — | — | >1000 @ 4 mm |
| Reference | This work | (26) | (16) | (12, 13) | (14) | (18) | (15) | (17) | (39) | (19) | (20) | (21) | (22) |
*Single-crystalline.
†Highly oriented.