Table 1 Chemical composition, elastic modulus, tensile strength, hardness, and activation volume of the sputter-deposited Ni-Mo-W film obtained from WDS, microtensile, and nanoindentation tests.
Composition (at %)Elastic modulus (GPa)Tensile strength (GPa)Hardness (GPa)Activation volume (b3)
0.05 s−10.2 s−11 s−1
Ni83.6±0.2Mo14±0.2W2.4±0.1221 ± 52.8 ± 0.38.95 ± 0.829.1 ± 0.919.24 ± 0.8619.6