The pore size, pore number density, and areal porosity of porous and patterned graphene membranes, all with standard deviation (SD), are shown. The pore statistics were obtained from the SEM graphs (section S5).
PG type | Porous | Patterned |
Number of layers | 1 | 2 |
Process parameter | Noncatalytic domain size | Dry etching time |
Pore size | 19.4 (±7.7)–54.1 (±20.3) nm* | 18 (±7)–30.5 (±18.3) nm† |
Areal porosity | 5.5–13.9%‡ | 4.4–18%§ |
Pore number density | 0.5–1.5 × 1010 cm−2 (~10–20% deviation)|| | 1.25–2.1 × 1010 cm−2 (~20% deviation)|| |
*Figure 2C, blue stars.
†Figure 2C, red circles.
‡Figure 2D, blue stars.
§Figure 2D, red circles.
||Section S7.