Table 1 Lists of amorphous Si3N4 PnC structures with a thickness of 70 nm.

Pitch (nm)PorosityDiameter (nm)Neck width
(nm)
360.442511
600.303525
600.363822
600.393921
1000.447030
1000.507426
1000.537624
1000.598119
2000.3913268
2000.4714456
2000.5415446
2000.5816040
2000.6917525
4000.39262138
4000.46285115
4000.5731783
8000.36506294
8000.44557243
8000.50594206
16000.31935665
16000.361013587
16000.401063537